Sb—Te-based alloy sintered compact sputtering target
AssigneeJX Metals Corporation
InventorsHideyuki Takahashi, Yoshimasa Koido
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AssigneeJX Metals Corporation
InventorsHideyuki Takahashi, Yoshimasa Koido
Estimating the term…
An Sb—Te-based alloy sintered compact sputtering target having Sb and Te as main components and which contains 0.1 to 30 at % of carbon or boron and comprises a uniform mixed structure of Sb—Te-based alloy particles and fine carbon (C) or boron (B) particles is provided. An average grain size of the Sb—Te-based alloy particles is 3 μm or less and a standard deviation thereof is less than 1.00. An average grain size of the C or B particles is 0.5 μm or less and a standard deviation thereof is less than 0.20. When the average grain size of the Sb—Te-based alloy particles is X and the average grain size of the carbon or boron particles is Y, Y/X is within a range of 0.1 to 0.5. This provides an improved Sb—Te-based alloy sputtering target that inhibits generation of cracks in the sintered target and prevents generation of arcing during sputtering.
An Sb—Te-based alloy sputtering target having a composition containing Sb and Te as main constituent elements thereof and carbon or boron in an amount of more than 10 at % and equal to or less than 30 at %, having a relative density of 97.85% or more, and having an average deflective strength of 100 MPa or higher, wherein the Sb—Te-based alloy sputtering target has a uniform structure comprising grains of an Sb—Te-based alloy phase and a uniform dispersion of grains of the carbon or boron, the grains of the Sb—Te-based alloy phase have an average size of 3 μm or less and a standard deviation of less than 1.00, the grains of the carbon or boron have an average size of 0.5 μm or less and a standard deviation of less than 0.20, and, for the average size of the grains of the Sb—Te-based alloy phase expressed by X and the average size of the grains of the carbon or boron expressed by Y, a ratio Y/X is within a range of from 0.213 to 0.5.
Dependencies are inferred from the claim text.