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US 11,842,907 B2Granted
Spot heating by moving a beam with horizontal rotary motion
AssigneeApplied Materials, Inc.
InventorsShu-Kwan Danny Lau, Toshiyuki Nakagawa, Zhiyuan Ye
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Abstract
Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a thermal process chamber. In one or more embodiments, a process chamber comprises a first window, a second window, a substrate support disposed between the first window and the second window, and a motorized rotatable radiant spot heating source disposed over the first window and configured to provide radiant energy through the first window.
Claims13
A process chamber, comprising:
- a first window;
- a second window;
- a substrate support disposed between the first window and the second window;
- a cooling plate;
- a rotary stage disposed in a first plane and on the cooling plate;
- and
- a motorized rotatable radiant spot heating source disposed over the first window and configured to provide radiant energy through the first window, such that the motorized rotatable radiant spot heating source is mounted to the rotary stage and positioned at an acute angle with respect to the first plane, wherein the rotary stage is rotatable to rotate the motorized rotatable radiant spot heating source.
4 more elements
A process chamber, comprising:
- a first window;
- a second window;
- a substrate support disposed between the first window and the second window;
- a rotary stage disposed in a first plane;
- a motorized rotatable radiant spot heating source disposed over the first window and configured to provide radiant energy through the first window, such that the motorized rotatable radiant spot heating source is mounted to the rotary stage and positioned at an acute angle with respect to the first plane, wherein the rotary stage is rotatable to rotate the motorized rotatable radiant spot heating source;
- and
- a rotary plate disposed on the rotary stage, the rotary plate rotatable about a vertical axis.
4 more elements
A spot heating source assembly, comprising:
- a collimator holder;
- a cooling plate;
- and
- a rotary stage disposed at a first plane, wherein the collimator holder is mounted to the rotary stage at an acute angle with respect to the first plane and the rotary stage is in direct contact with the cooling plate, the cooling plate mounted in a second plane parallel to the first plane.
1 more element
Dependencies are inferred from the claim text.