Electron gun, electron gun component, electron beam applicator, and alignment method

An electron gun component comprising:

• an electrode kit;
• and
• an electrode kit drive device,
• wherein the electrode kit includes
• a photocathode supporting part, and
• an anode arranged spaced apart from the photocathode supporting part,
• wherein the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.

An alignment method for aligning an emission axis of an electron beam emitted from an electron gun with an optical axis of an electron optical system of an electron beam applicator,

• wherein the electron gun includes
• a light source,
• a photocathode,
• an electrode kit, and
• an electrode kit drive device,
• wherein the electrode kit includes
• a photocathode supporting part, and
• an anode arranged spaced apart from the photocathode supporting part,
• wherein the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane,
• the alignment method comprising:
• an electron beam emission step of irradiating the photocathode with light from the light source to cause the photocathode to emit an electron beam;
• and
• an electron beam emission axis adjustment step of, while emitting the electron beam, using the electrode kit drive device to move the electrode kit on which the photocathode is placed and aligning the emission axis of the electron beam with the optical axis of the electron optical system of the electron beam applicator.