Pattern forming method, imprint apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorRyohei Suzuki
Life of this patent
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Abstract
A pattern forming method of forming, with a mold, a pattern on a substrate held by a substrate holding unit capable of changing a holding force for each holding region includes setting, with a plurality of shot regions corresponding to a first holding region as a target for pattern formation, a first holding force in the first holding region smaller than a second holding force in a second holding region different from the first holding region, coating, with an imprint material, a region including the plurality of shot regions corresponding to the first holding region, and forming the pattern on the substrate by bringing the imprint material, with which the plurality of shot regions corresponding to the first holding region is coated, and the mold in contact with each other.
Claims11
A pattern forming method of forming, with a mold, a pattern on a substrate held by a substrate holding unit comprising a plurality of holding regions capable of changing a holding force for each holding region of the plurality of holding regions, the pattern forming method comprising:
- setting, with a first plurality of shot regions corresponding to a first holding region set as a target for pattern formation, a value of a first holding force in the first holding region at a first value that is smaller than a value of a second holding force in a second holding region different from the first holding region, wherein the plurality of holding regions includes the first holding region and the second holding region;
- coating, with an imprint material, a region including the first plurality of shot regions corresponding to the first holding region;
- and
- after coating the region including the first plurality of shot regions with the imprint material, forming instances of the pattern on the substrate by repeatedly bringing the imprint material, with which the first plurality of shot regions corresponding to the first holding region has been coated, and the mold in contact with each other.
An article manufacturing method comprising:
- forming, with a mold, a pattern on a substrate held by a substrate holding unit capable of changing a holding force for each holding region of a plurality of holding regions, wherein the plurality of holding regions includes a first holding region and a second holding region;
- and
- treating the substrate on which the pattern is formed in the forming the pattern,
- wherein the forming the pattern includes:
- setting, with a first plurality of shot regions corresponding to the first holding region set as a target for pattern formation, a first holding force in the first holding region to a value that is smaller than a value of a second holding force in a second holding region different from the first holding region;
- coating, with an imprint material, a region including the first plurality of shot regions corresponding to the first holding region;
- and
- after coating the region including the first plurality of shot regions with the imprint material, repeatedly bringing the imprint material, with which the first plurality of shot regions corresponding to the first holding region has been coated, and the mold in contact with each other.
Dependencies are inferred from the claim text.