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US 11,837,211 B2Granted
Magnetic field sensor using acoustically driven ferromagnetic resonance
AssigneeThe Regents of the University of California
InventorsSayeef Salahuddin, Dominic E. Labanowski
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Abstract
An acoustically driven ferromagnetic resonance (ADFMR) device includes a piezoelectric element, a pair of transducers arranged to activate the piezoelectric element to generate an acoustic wave, a magnetostrictive element arranged to receive the acoustic wave, and a readout circuit to detect one of either a change in the magnetostrictive element or a change in the acoustic wave.
Claims7
An acoustically driven ferromagnetic resonance (ADFMR) device, comprising:
- a substrate comprising a piezoelectric element comprised of piezoelectric material;
- a pair of interdigitated transducers residing on the piezoelectric element, one of the pair of interdigitated transducers being an input transducer and one of the pair of interdigitated transducers being an output transducer, the input transducer arranged to activate the piezoelectric element to generate an acoustic wave;
- a radio frequency voltage source electrically connected to the input transducer to apply a radio frequency voltage having a frequency of at least 0.86 GHz to the input transducer to generate the acoustic wave at the radio frequency;
- a magnetostrictive element comprised of a magnetostrictive material arranged in a region between the pair of interdigitated transducers and to receive and absorb the acoustic wave, wherein the acoustic wave excites the magnetostrictive element into ferromagnetic resonance (FMR);
- and
- a readout circuit connected to the output transducer to detect an output voltage having an attenuated amplitude that indicates a change in the acoustic wave amplitude caused by absorption of the acoustic wave by the magnetostrictive element in FMR to measure an unknown magnetic field in which the ADFMR device resides and as experienced by the magnetostrictive element.
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A method of operating a sensor to detect a magnetic field, comprising:
- placing the sensor in an unknown magnetic field;
- applying a radio frequency voltage in having a frequency of at least 0.86 GHz to one of a pair of interdigitated transducers arranged adjacent a piezoelectric element comprised of a piezoelectric material, the radio frequency voltage to cause the piezoelectric element to generate an acoustic wave that passes through a magnetostrictive element comprised of a magnetostrictive material wherein the acoustic wave excites the magnetostrictive element into ferromagnetic resonance (FMR);
- measuring a change in power of the acoustic wave after passing through and being at least partially absorbed by the magnetostrictive element in FMR by measuring an output voltage amplitude at the other of the pair of interdigitated transducers;
- and
- determining the unknown magnetic field experienced at the magnetostrictive element based upon the change in the acoustic wave amplitude.
2 more elements
Dependencies are inferred from the claim text.