Powder for forming black light-shielding film and method for manufacturing same
AssigneeMitsubishi Materials Electronic Chemicals Co., Ltd.
InventorsTakashi Konishi, Kensuke Kageyama
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Abstract
The present invention provides a powder for forming a black light-shielding film having a specific surface area of 20 to 90 m2/g, which is measured by the BET method, comprising zirconium nitride as a main component, and containing magnesium and/or aluminum. If containing the magnesium, the content of the magnesium is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming a black light-shielding film, and if containing the aluminum, the content of the aluminum is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film.
Claims6
A powder for forming a black light-shielding film having a specific surface area of 20 to 90 m2/g, which is measured by the BET method, comprising a zirconium nitride powder as a main component, and containing magnesium and aluminum, wherein:
- the powder for forming the black light-shielding film comprises:
- a nano-particulated zirconium nitride particle and,
- an oxidized film layer or a nitride film layer with aluminum and magnesium generated on a surface layer of the nano-particulated zirconium nitride particle, and
- the content of the magnesium is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film, and the content of the aluminum is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film.
Dependencies are inferred from the claim text.