Inspection position identification method, three-dimensional image generation method, and inspection device

An inspection device that inspects an inspected substrate using a three-dimensional image generated from a radiation transmission image of the inspected substrate, the device being characterized by comprising:

• a radiation generator for irradiating the inspected substrate with radiation;
• an inspected substrate holding unit that holds the inspected substrate;
• a first drive mechanism for moving the inspected substrate holding unit around an axis passing through a focal point of the radiation of the radiation generator;
• a radiation detector for detecting the radiation having passed through the inspected substrate;
• a second drive mechanism for moving the radiation detector around the axis passing through the focal point of the radiation of the radiation generator;
• a control unit that generates a three-dimensional image from a radiation transmission image detected by the radiation detector;
• and
• an inspection area identification unit that divides a tomographic image in the three-dimensional image into a plurality of areas, calculates a piece of shift information with respect to a reference image corresponding to a surface of the inspected substrate for each of the plurality of areas, and identifies an inspection area in the three-dimensional image based on an amount of correction calculated based on the plurality of pieces of shift information.