Strain inducing body for suppressing displacement of sensor chip mounting site and force sensor device including the same

A force sensor device comprising a strain inducing body and a sensor chip, wherein the strain inducing body comprises:

• a strain inducing portion including a movable portion that deforms in response to force or moment in a predetermined axial direction and a non-movable portion that does not deform in response to the force or moment, and
• an input transmitter that is connected to the non-movable portion and does not deform in response to the force or moment,
• wherein the input transmitter includes,
• a first frame portion,
• a plurality of first beam structures each of which has one end thereof connected to the first frame portion and extends from the first frame portion to an inside of the first frame portion,
• a first coupling portion that connects other ends of the first beam structures,
• an accommodating portion that is provided inside and is fixedly connected to the first coupling portion and that is capable of housing the sensor chip to detect the force or the moment.

A strain inducing body comprising:

• a strain inducing portion including a movable portion that deforms in response to force or moment in a predetermined axial direction and a non-movable portion that does not deform in response to the force or moment;
• and
• an input transmitter that is connected to the non-movable portion and does not deform in response to the force or moment,
• wherein the input transmitter includes,
• a first frame portion,
• a plurality of first beam structures each of which has one end thereof connected to the first frame portion and extends from the first frame portion to an inside of the first frame portion,
• a first coupling portion that connects other ends of the first beam structures,
• an accommodating portion that is provided inside the first coupling portion and that is connected to a bottom surface of a sensor chip to detect the force or the moment.

A strain inducing body comprising:

• a strain inducing portion including a movable portion that deforms in response to force or moment in a predetermined axial direction and a non-movable portion that does not deform in response to the force or moment;
• and
• an input transmitter that is connected to the non-movable portion and does not deform in response to the force or moment,
• wherein the input transmitter includes,
• a first frame portion,
• a plurality of first beam structures each of which has one end thereof connected to the first frame portion and extends from the first frame portion to an inside of the first frame portion,
• a first coupling portion that connects other ends of the first beam structures,
• an accommodating portion that is provided inside the first coupling portion and that is capable of housing a sensor chip to detect the force or the moment,
• wherein a plurality of the first beam structures includes two opposing first beam structures facing each other across a center of the first frame portion and the other two opposing first beam structures facing each other across the center of the first frame portion,
• wherein the accommodating portion includes,
• four vertical supports connected at one end to the first coupling portion and extending vertically from the first coupling portion toward the strain inducing portion,
• four horizontal supports extending horizontally from ends of the vertical supports, and
• a second coupling portion that connects other ends of the horizontal supports, and
• wherein the two vertical supports and the two horizontal supports face each other across the center of the first frame portion in a plan view, and the other two vertical supports and the other two horizontal supports face each other across the center of the first frame portion in a plan view.