Fluid control valve
AssigneeSMC Corporation
InventorHisashi Yajima
Life of this patent
Estimating the term…
Abstract
A first diaphragm and a second diaphragm are disposed between a valve element and a body, a diaphragm chamber is formed between the first diaphragm and the second diaphragm, the first diaphragm separates a valve chamber from the diaphragm chamber, and the second diaphragm separates the diaphragm chamber from a back pressure chamber. The diaphragm chamber communicates with an output port, the valve chamber and the back pressure chamber communicate with an input port. A difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in a valve seat.
Claims8
A fluid control valve comprising:
- a body including an input port and an output port;
- and
- a valve element configured to abut against a valve seat of the body, wherein
- a first diaphragm and a second diaphragm are disposed between the valve element and the body,
- a diaphragm chamber is formed between the first diaphragm and the second diaphragm,
- the first diaphragm separates a valve chamber from the diaphragm chamber,
- the second diaphragm separates the diaphragm chamber from a back pressure chamber,
- the diaphragm chamber communicates with the output port,
- the valve chamber and the back pressure chamber communicate with the input port, and
- a difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in the valve seat.
A fluid control valve comprising:
- a body including an input port and an output port;
- and
- a valve element configured to abut against a valve seat of the body, wherein
- a first diaphragm and a second diaphragm are disposed between the valve element and the body,
- a diaphragm chamber is formed between the first diaphragm and the second diaphragm,
- the first diaphragm separates a valve chamber from the diaphragm chamber,
- the second diaphragm separates the diaphragm chamber from a back pressure chamber,
- the diaphragm chamber communicates with the input port,
- the valve chamber and the back pressure chamber communicate with the output port, and
- a difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in the valve seat.
A fluid control valve comprising:
- a body including an input port and an output port;
- and
- a valve element configured to abut against a valve seat of the body, wherein
- a first diaphragm and a second diaphragm are disposed between the valve element and the body,
- a diaphragm chamber is formed between the first diaphragm and the second diaphragm,
- the first diaphragm separates a valve chamber from the diaphragm chamber,
- the second diaphragm separates the diaphragm chamber from a back pressure chamber,
- the diaphragm chamber communicates with the output port,
- the valve chamber and the back pressure chamber communicate with the input port,
- one end part of the valve element extends from the back pressure chamber toward a chamber that is disposed on an outer side of the body and communicates with the output port, and
- a difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a difference between a passage area in the valve seat and a cross-sectional area of the one end part of the valve element.
Dependencies are inferred from the claim text.