Short-travel nanoscale motion stage and method for measuring thermally-related hysteresis data

A short-travel nanoscale motion stage, comprising two foundation frames, a stage moving component, two inchworm motors, two two-pole electromagnets, two measuring systems, and an aerostatic guideway wherein the two foundation frames refer to a left foundation frame and a right foundation frame;

• the two two-pole electromagnets refer to a left two-pole electromagnet and a right two-pole electromagnet;
• each of the two measuring systems comprises an eddy current sensor and a hall sensor;
• a stator unit of the left two-pole electromagnet and stator units of the two inchworm motors are fixed on a right side surface of the left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of the stage moving component;
• an active unit of the right two-pole electromagnet is fixed on a right side surface of the stage moving component, and a stator unit of the right two-pole electromagnet is fixed on a left side surface of the right foundation frame;
• the stage moving component is fixedly mounted on a guide sleeve of the aerostatic guideway, and the stage moving component is guided by a guide spindle of the aerostatic guideway to move at degrees of freedom along X and Rz axes;
• each of the stator unit of the left two-pole electromagnet and the stator unit of the right two-pole electromagnet has-aft the eddy current sensor and the hall sensor fixed therein to measure a magnetic flux of the two-pole electromagnet and a displacement of the stage moving component at degrees of freedom along the X and Rz axes.