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US 11,830,702 B2Granted
Grid structure
AssigneeChangxin Memory Technologies, Inc.
InventorWei Yang
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure provide a grid structure. The grid structure includes a carrier and a support column; wherein the support column is located on the carrier, the support column has a top surface for supporting a sample; and the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface.
Claims15
A grid structure, comprising:
- a carrier;
- and
- a support column, the support column being located on the carrier, wherein
- the support column has a top surface for supporting a sample;
- the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface;
- and
- a depth of the groove is 10 μm to 100 μm in the direction from the top surface to the carrier.
4 more elements
A grid structure, comprising:
- a carrier;
- and
- a support column, the support column being located on the carrier, wherein
- the support column has a top surface for supporting a sample;
- the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface;
- grooves located on different support columns have different volumes;
- and
- the grooves located on the different support columns have different depths in the direction from the top surface to the carrier.
5 more elements
A grid structure, comprising:
- a carrier;
- and
- a support column, the support column being located on the carrier, wherein
- the support column has a top surface for supporting a sample;
- the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface;
- and
- the top surface of the support column comprises a plurality of first top surfaces, and the plurality of first top surfaces form a stepped surface;
- the groove comprises a plurality of first grooves, each first groove corresponds to each first top surface, and a groove wall of each groove is connected to the corresponding first top surface.
5 more elements
Dependencies are inferred from the claim text.