Back to results
US 11,828,707 B2Granted
Method and apparatus for transmittance measurements of large articles
AssigneeASM IP Holding B.V.
InventorsShiva K. T. Rajavelu Muralidhar, Youness Alvandi-Tabrizi, John DiSanto, Sam Kim
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for measuring light intensity are disclosed. The methods and apparatus can be used to verify an article, such as a reaction chamber. Exemplary apparatus include a first arm, a light source coupled to the first arm, a second arm, and a sensor coupled to the second arm. The sensor can receive light from the light source that is transmitted through at least a portion of the article.
Claims9
A method of verifying an article having features thereon, the method comprising the steps of:
- providing an apparatus comprising:
- a first arm;
- a light source coupled to the first arm;
- a second arm;
- a first motor to cause the first arm and the second arm to move in a first direction;
- a second motor to cause the first arm and the second arm to move in a second direction;
- and
- a sensor coupled to the second arm,
- wherein the first direction and the second direction are linear directions;
- using the apparatus, measuring a transmittance of light from the light source through a wall of the article;
- and
- determining a quality of the article based on measured transmittance values,
- wherein the article comprises a reaction chamber, wherein the reaction chamber comprises at least one wall and a plurality of support structures that are integrally formed on or are attached to the at least one wall.
10 more elements
Dependencies are inferred from the claim text.