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AssigneeASML Netherlands B.V.
InventorsJeroen Johan Maarten Van De Wijdeven, Johannes Petrus Martinus Bernardus Vermeulen, Jeroen Pieter Starreveld, Stan Henricus Van Der Meulen
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The invention provides a support with first and second end portions. The second end portion is on the side opposite to the first end portion in a longitudinal direction of the support. A coil spring is arranged between the first and second end portions. The coil spring comprises a first spiral member that extends between the first and second end portions in a circumferential direction of the support, and a second spiral member that extends between the first and second end portions in a circumferential direction of the support. The first and second spiral members extend in the longitudinal direction around a longitudinal axis of the support, wherein the first spiral member of the coil spring and the second spiral member of the coil spring are moveable relative to each other, and wherein the support further comprises a damper device that is attached to the first spiral member.
A support comprising:
A vibration isolation system, comprising:
A lithographic apparatus with a support that comprises:
Dependencies are inferred from the claim text.