US 11,823,923 B2Granted

Transfer chamber

AssigneeSinfonia Technology Co., Ltd.

InventorsToshihiro Kawai, Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama

Life of this patent

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Abstract

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Claims8

Dependent claims

A transport chamber for transferring a transferred object to or from a load lock chamber by using a transfer robot disposed in a transfer space inside of a housing with an air flow circulated inside the housing, comprising:

a front wall to which the load port is connected,
a rear wall with an opening to which the load lock chamber is connected, the rear wall extending in a perpendicular direction, a left direction and a right direction,
a first fan that forms the air flow downward in the transfer space,
a gas return space that is placed close to the rear wall, the gas return space communicating with the transfer space such that the air flow in the transfer space enters the gas return space to flow upward in the gas return space, the gas return space comprising:
a first gas return space portion provided at a side of the left direction of the opening;
and
a second gas return space portion provided at a side of the right direction of the opening.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/860,202Filed 8 Jul 2022 · division
Priority: JP 2015-03838827 Feb 2015
Published: US 2022/0344182 A127 Oct 2022
Granted: 21 Nov 2023
Term ends: Not estimatedThe source records don’t support an estimate.

Classification24 codes

H10P 72/0464
Apparatus for manufacturing or treating in a plurality of work-stations: characterised by the construction of the transfer chamber
B01D 53/04
By adsorption, e.g. preparative gas chromatography: with stationary adsorbents
B01D 53/40
Removing components of undefined structure: acidic components
B01D 53/42
Removing components of undefined structure: basic components

Family

PCT/JP2016/053553Parent of this division · filed 5 Feb 2016
Application16/845,555Parent of this division · filed 10 Apr 2020
US 10,672,632 B2Parent of this division · filed 2 Jun 2020
US 2022/0344182 A1Pre-grant publication · published 27 Oct 2022
US 11,424,145 B2Parent of this division
Application15/554,135Parent of this division
US 2018/0040493 A1Published application
US 2020/0312686 A1Published application
US 11,823,923 B2This patent

From the US filing history. Foreign family members aren’t listed.