Foil trap and light source apparatus including the same
AssigneeUshio Denki Kabushiki Kaisha
InventorHironobu Yabuta
Life of this patent
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Abstract
A foil trap that captures debris released from a plasma includes a hub structure, a plurality of foils, and a shield member. The hub structure has a circumferential surface portion and a front surface portion facing the plasma. The foils are arranged radially around the hub structure and are supported by brazing on the circumferential surface portion. The shield member is disposed on the front surface portion, has a circumferential edge portion that shields the circumferential surface portion from the plasma, and forms a thermal resistance section between the shield member and the hub structure.
Claims13
A foil trap that captures debris released from a plasma, the foil trap comprising:
- a hub structure having a circumferential surface portion and a front surface portion facing the plasma;
- a plurality of foils that are arranged radially around the hub structure and that are supported by brazing on the circumferential surface portion;
- and
- a shield member that is disposed on the front surface portion, has a circumferential edge portion for shielding the circumferential surface portion from the plasma, and forms a thermal resistance section between the shield member and the hub structure.
A light source apparatus comprising:
- a plasma generation chamber;
- a light extraction section that extracts light emitted from a plasma generated in the plasma generation chamber;
- and
- a foil trap that is disposed between the plasma generation chamber and the light extraction section, and that captures debris released from the plasma,
- the foil trap including
- a rotation shaft including a cooling mechanism,
- a hub structure having a circumferential surface portion and a front surface portion facing the plasma, and being fixed to a front end portion of the rotation shaft,
- a plurality of foils arranged radially around the hub structure and supported by brazing on the circumferential surface portion, and
- a shield member disposed on the front surface portion, having a circumferential edge portion that shields the circumferential surface portion from the plasma, and forming a thermal resistance section between the shield member and the hub structure.
Dependencies are inferred from the claim text.