Magnetic sensor
AssigneeResonac Corporation
InventorsDaizo Endo, Akira Sakawaki
Life of this patent
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Abstract
A magnetic sensor 1 includes: a non-magnetic substrate 10; and a sensitive element 30 disposed on the substrate 10. The sensitive element 30 has a longitudinal direction and a transverse direction and has a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction. The sensitive element 30 is configured to sense a magnetic field by a magnetic impedance effect. The sensitive element 30 includes a soft magnetic material layer 101 made of an amorphous alloy based on Co and having a saturation magnetization of greater than or equal to 300 emu/cc and less than or equal to 650 emu/cc.
Claims10
A magnetic sensor comprising:
- a non-magnetic substrate;
- and
- a sensitive element disposed on the substrate, the sensitive element having a longitudinal direction and a transverse direction, the sensitive element having a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element being configured to sense a magnetic field by a magnetic impedance effect, the sensitive element including a soft magnetic material layer made of an amorphous alloy based on Co, the soft magnetic material layer having a saturation magnetization of greater than or equal to 300 emu/cc and less than or equal to 650 emu/cc,
- wherein the sensitive element includes a plurality of the soft magnetic material layers, and
- wherein the sensitive element includes a magnetic domain suppression layer between the plurality of the soft magnetic material layers, the magnetic domain suppression layer being configured to suppress generation of closure magnetic domains in the soft magnetic material layers.
A magnetic sensor comprising:
- a non-magnetic substrate;
- a sensitive element disposed on the substrate, the sensitive element having a longitudinal direction and a transverse direction, the sensitive element having a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element being configured to sense a magnetic field by a magnetic impedance effect, the sensitive element including a soft magnetic material layer made of an amorphous alloy containing 3 at % Zr and greater than or equal to 17 at % and less than 21 at % Nb with a balance of Co,
- wherein the sensitive element includes a plurality of the soft magnetic material layers, and
- wherein the sensitive element includes a magnetic domain suppression layer between the plurality of the soft magnetic material layers, the magnetic domain suppression layer being configured to suppress generation of closure magnetic domains in the soft magnetic material layers.
Dependencies are inferred from the claim text.