Fluid control apparatus

A fluid control apparatus comprising:

• a first major plate having a first major surface and a second major surface;
• a second major plate having a third major surface and a fourth major surface, the third major surface facing the first major surface;
• a peripheral plate connecting the first major plate and the second major plate to each other;
• and
• a pump chamber enclosed by the first major plate, the second major plate, and the peripheral plate,
• wherein the first major plate includes a central portion;
• a frame portion provided around a circumference of the central portion;
• a supporting portion connected to the frame portion and to the central portion and supporting the central portion to make the central portion vibratable;
• and a first opening provided between the central portion and the frame portion and connecting the pump chamber and an outside area near the second major surface to each other,
• wherein the second major plate includes a second opening connecting the pump chamber and an outside area near the fourth major surface to each other and provided at a position at least partially coinciding with the supporting portion or the frame portion when seen in a direction from the first major plate toward the second major plate,
• wherein the fluid control apparatus further includes
• a piezoelectric device provided on the central portion and configured to vibrate the central portion;
• a first rectifying member provided between the first major plate and the second major plate in a sectional view of the apparatus and being capable of switching, with vibration of the central portion, a state of connection of the pump chamber and the outside area near the second major surface through the first opening between a connected state of the first opening and a disconnected state of the first opening, wherein the first rectifying member includes a first film;
• and
• a second rectifying member provided between the second major plate and the first rectifying member in the sectional view of the apparatus and being capable of switching, with vibration of the central portion, a state of connection of the pump chamber and the outside area near the fourth major surface through the second opening between a connected state of the second opening and a disconnected state of the second opening, wherein the second rectifying member includes a second film,
• wherein when the first rectifying member establishes the connected state of the first opening where the pump chamber is connected to the outside area near the second major surface, the second rectifying member establishes the disconnected state of the second opening where the pump chamber at the central portion is disconnected from the outside area near the fourth major surface, and
• wherein when the first rectifying member establishes the disconnected state of the first opening where the pump chamber at the central portion is disconnected from the outside area near the second major surface, the second rectifying member establishes the connected state of the second opening where the pump chamber at the central portion is connected to the outside area near the fourth major surface.