Back to results
US 11,819,923 B2Granted
Conductive powder formation method and device for forming conductive powder
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYou-Hua Chou, Kuo-Sheng Chuang
Life of this patent
Estimating the term…
Abstract
A method of forming a conductive powder includes reducing, by a reduction reaction, a conductive powder precursor gas using a plasma to form the conductive powder. The method further includes filtering the conductive powder based on particle size. The method further includes dispersing a portion of the conductive powder having a particle size below a threshold value in a fluid.
Claims19
A method of forming a conductive powder, the method comprising:
- reducing, by a reduction reaction, a conductive powder precursor gas using a plasma to form the conductive powder;
- filtering the conductive powder based on particle size;
- dispersing a portion of the conductive powder having a particle size below a threshold value in a fluid;
- and
- returning a portion of the conductive powder having a particle size equal to or greater than the threshold value to the reaction chamber.
2 more elements
A method of forming a conductive powder, the method comprising:
- reducing, by a reduction reaction, a conductive powder precursor gas using a plasma to form the conductive powder in a reaction chamber;
- vibrating the reaction chamber during the reducing;
- filtering the conductive powder based on particle size;
- dispersing a portion of the conductive powder having a particle size below a threshold value in a fluid;
- and
- returning a portion of the conductive powder having a particle size equal to or greater than the threshold value to the reaction chamber.
3 more elements
A method of forming a conductive powder, the method comprising:
- reducing, by a reduction reaction, a conductive powder precursor gas using a plasma to form the conductive powder;
- filtering the conductive powder based on particle size;
- dispersing a first portion of the conductive powder in a fluid, wherein the first portion of the conductive powder has a particle size below a threshold value;
- and
- recycling a second portion of the conductive powder through the reducing, the filtering and the dispersing, wherein the second portion of the conductive powder has a particle size equal to or greater than the threshold value.
2 more elements
Dependencies are inferred from the claim text.