Method and an apparatus for applying thin film material onto a substrate
AssigneesImec Vzw, Universiteit Hasselt
InventorsRachith Shanivarasanthe Nithyananda Kumar, Wim Deferme
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Abstract
A method for applying thin film material onto a substrate comprises: forming microdroplets of a solvent and a solute material forming the thin film material; depositing the microdroplets on an upper surface of a micro-structured mesh, wherein the microdroplets are deposited to allow coalescing into droplets extending into the micro-structured mesh; and arranging a surface of the substrate in close relation to a bottom surface of the micro-structured mesh such that a capillary force draws liquid of the droplets onto the surface of the substrate, whereby forced dynamic wetting of the surface of the substrate is provided to form a liquid film on the surface of the substrate.
Claims13
A method for applying thin film material onto a substrate, said method comprising:
- forming microdroplets of a solvent and a solute material forming the thin film material;
- depositing the microdroplets on an upper surface of a micro-structured mesh, wherein the microdroplets are deposited to allow coalescing of microdroplets on the micro-structured mesh into droplets extending at least into the micro-structured mesh and possibly protruding from a bottom surface of the micro-structured mesh;
- and
- arranging a surface of the substrate in close relation to, but not touching, the bottom surface of the micro-structured mesh such that a capillary force draws liquid of the droplets extending at least into the micro-structured mesh and possibly protruding from the bottom surface of the micro-structured mesh onto the surface of the substrate, whereby forced dynamic wetting of the surface of the substrate is provided to form a uniform liquid film on the surface of the substrate.
Dependencies are inferred from the claim text.