Erasable programmable single-poly non-volatile memory cell and associated array structure
AssigneeeMemory Technology Inc.
InventorsHsueh-Wei Chen, Woan-Yun Hsiao, Wei-Ren Chen, Wein-Town Sun
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Abstract
An erasable programmable single-poly non-volatile memory cell and an associated array structure are provided. In the memory cell of the array structure, the assist gate region is composed at least two plate capacitors. Especially, the assist gate region at least contains a poly/poly plate capacitor and a metal/poly plate capacitor. The structures and the fabricating processes of the plate capacitors are simple. In addition, the uses of the plate capacitors can effectively reduce the size of the memory cell.
Claims13
An array structure of erasable programmable non-volatile memory cells, the array structures being constructed in a substrate, the array structure comprising:
- an isolation structure formed on the substrate, wherein a surface of the substrate is divided into a first region and a second region by the isolation structure;
- a first well region formed in the surface of the substrate corresponding to the first region;
- a second well region formed in the surface of the substrate corresponding to the second region;
- a first gate structure and a second gate structure formed on the surface of the first region, wherein the first region is divided into a first doped region, a second doped region and a third doped region by the first gate structure and the second gate structure, the first gate structure is connected to a first select gate line, the second gate structure is extended externally to the second region through a surface of the isolation structure, and a portion of the second region is covered by the second gate structure, the first doped region is connected to a source line, and the third doped region is connected to a first bit line;
- a third gate structure formed on the isolation structure, and located beside a first side of the second gate structure;
- a fourth doped region formed in the surface of the substrate corresponding to the second region, wherein the fourth doped region is connected to an erase line;
- and
- a metal layer formed over the second gate structure, and electrically connected to the third gate structure, wherein the metal layer is connected to an assist gate line;
- wherein the first gate structure comprises a first gate oxide layer and a first polysilicon gate layer, the second gate structure comprises a second gate oxide layer and a second polysilicon gate layer, and the third gate structure comprises a third gate oxide layer and a third polysilicon gate layer,
- wherein the first doped region, the first gate structure and the second doped region are collaboratively formed as a first select transistor, the second doped region, the second gate structure and the third doped region are collaboratively formed as a first floating gate transistor, the second gate structure and the fourth doped region are collaboratively formed as a first MOS capacitor, the second polysilicon gate layer and the third polysilicon gate layer are collaboratively formed as a first poly/poly plate capacitor, and the second polysilicon gate layer and the metal layer are collaboratively formed as a first metal/poly plate capacitor,
- wherein a first memory cell of the array structure comprises the first select transistor, the first floating gate transistor, the first MOS capacitor, the first poly/poly plate capacitor and the first metal/poly plate capacitor.
Dependencies are inferred from the claim text.