A method for manufacturing a photodetector including a first substrate having a transparent electrode, and a photoelectric conversion layer having a superlattice structure mostly composed of amorphous selenium, for which initial requirements including a minimum incident light power that needs to be detected, a wavelength that needs to be detected, a collector current Ic that a light receiving device connected to the photodetector to be fabricated requires, and a dark current ID that the photodetector to be fabricated allows have been selected, comprising:
- a step of calculating via a CPU and a memory device on the basis of the initially-chosen requirements a multiplication factor M representing an amplification gain generated in a process of tunneling in the superlattice structure;
- the multiplication factor M being calculated by the following equation:
- M
- =
- I
- C
- -
- I
- D
- q
-
- N
- 0
-
- 0
- wherein q is a basic electronic charge, and N00 is the number of photons serving as carriers in the tunneling, the numerical values of each factor required for the calculation of the equation being read from the memory device;
- a step of determining via the CPU, as a layer thickness of the photoelectric conversion layer, a thickness obtained by multiplying a thickness per one layer of the superlattice structure by the number of layers NSL of the superlattice structure on the assumption that the multiplication factor M is approximate to the number of layers NSL, and
- fabricating the photodetector by laminating the photoelectric conversion layer on the substrate by rotational evaporation by matching the number of layers NSL with the number of rotations of a turntable.