Methods and systems for acquiring three-dimensional electron diffraction data
AssigneeFEI Company
InventorsBart Buijsse, Jaydeep Sanjay Belapure, Alexander Henstra, Michael Patrick Janus, Stefano Vespucci
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Abstract
Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.
Claims21
A method, comprising:
- acquiring a sample image of a sample;
- selecting multiple crystals in the sample image;
- determining coordinates of the multiple selected crystals;
- directing an electron beam towards each of the multiple selected crystals and acquiring multiple diffraction patterns from the multiple selected crystals without rotating or moving the sample, wherein at a location of each of the multiple selected crystals, adjusting the electron beam to acquire multiple diffraction patterns of the selected crystal at different incident angles;
- and
- extracting crystallographic information from the multiple diffraction patterns.
A system, comprising:
- an electron source for generating an electron beam along an optical axis;
- a sample holder for holding a sample and adjusting a sample position;
- a deflector for shifting the electron beam to irradiate different locations of the sample and tilting the electron beam to adjust an incident angle;
- a detector for detecting electrons transmitted through the sample;
- and
- a controller including a non-transitory memory for storing computer readable instructions, wherein by executing the computer readable instructions, the controller is configured to:
- acquire a sample image of the sample;
- select multiple crystals in the sample image;
- determine coordinates of the multiple selected crystals;
- direct the electron beam towards each of the multiple selected crystals by shifting the electron beam and acquire multiple diffraction patterns from the multiple selected crystals without moving or rotator the sample via the sample holder, wherein at a location of each selected crystal, tilt the electron beam to acquire multiple diffraction patterns of the selected crystal at different incident angles;
- merge multiple diffraction patterns of the selected crystals into a diffraction dataset;
- and
- extract crystallographic information from the diffraction dataset.
Dependencies are inferred from the claim text.