Resonant pressure sensor with improved linearity

A resonant pressure sensor, comprising:

• a housing;
• a housing-fixed portion that is fixed to the housing;
• a substrate that comprises:
• a substrate-fixed portion that is fixed to the housing-fixed portion;
• and
• a substrate-separated portion that is separated from the housing-fixed portion and extends from the substrate-fixed portion;
• a first resonator that:
• is disposed in the substrate-separated portion;
• and
• detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate and enveloping the substrate;
• a second resonator that:
• is disposed in the substrate;
• detects a change of a second resonance frequency based on the strain in the substrate;
• and
• has a pressure sensitivity of the second resonance frequency that differs from a pressure sensitivity of the first resonance frequency of the first resonator;
• and
• a processor that:
• measures the static pressure based on the detected change of the first resonance frequency;
• and
• corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.