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US 11,815,079 B2Granted
Vacuum pumping system having multiple pumps
AssigneeEdwards Limited
InventorAndrew David Chew
Life of this patent
Estimating the term…
Abstract
A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.
Claims15
A vacuum pumping system comprising:
- a flange configured to mount to a vacuum chamber wall;
- a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar, the high pressure getter pump comprising a source and a surface extending around the source wherein the surface extends through the vacuum chamber wall when the flange is mounted to the vacuum chamber wall;
- and
- at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, the high vacuum pump mounted on the flange.
1 more element
A vacuum pumping system comprising:
- a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar;
- and
- at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, said two pumps being mounted on a same flange, said flange being configured to mount said vacuum pumping system to a vacuum chamber;
- wherein said at least one high vacuum pump comprises an ion getter pump.
1 more element
A vacuum pumping system comprising:
- a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar;
- and
- at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, said two pumps being mounted on a same flange, said flange being configured to mount said vacuum pumping system to a vacuum chamber;
- wherein said high pressure getter pump is mounted on one side of said flange and at least one of said at least one high vacuum pump is mounted on the other side of the flange, such that said pumps are arranged in series, with an outlet from said high pressure getter pump connecting via an aperture within the flange to an inlet of said at least one high vacuum pump.
1 more element
Dependencies are inferred from the claim text.