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US 11,814,351 B2Granted
Bifunctional (meth)acrylate compound and polymer
AssigneeMaruzen Petrochemical Co., Ltd.
InventorsSatoshi Kakuta, Hiromitsu Baba, Teruyo Ikeda, Ryo Fujisawa, Kazuhiko Haba
Life of this patent
Estimating the term…
Abstract
Provided is a compound that can be used for a resin for a resist having excellent sensitivity, resolution, and etching resistance, or the like, by a compound represented by the following formula (1): (wherein R1 represents a hydrogen atom or a methyl group, R2 represents an aliphatic hydrocarbon group having 1 to 6 carbon atoms, m represents an integer of 0 to 5, and n represents an integer of 0 to 4).
Claims8
A compound represented by the following formula (1):
- wherein R1 represents a hydrogen atom or a methyl group, R2 represents an aliphatic hydrocarbon group having 1 to 6 carbon atoms, m represents an integer of 0 to 5, and n represents an integer of 0 to 4.
Dependencies are inferred from the claim text.