Electrode arrangement for a pMUT and pMUT transducer array
AssigneeVanguard International Semiconductor Singapore Pte. Ltd.
InventorsAveek Nath Chatterjee, Rakesh Kumar, Jaime Viegas, Mateusz Tomasz Madzik
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AssigneeVanguard International Semiconductor Singapore Pte. Ltd.
InventorsAveek Nath Chatterjee, Rakesh Kumar, Jaime Viegas, Mateusz Tomasz Madzik
Estimating the term…
Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns.
A piezoelectric micro-machined ultrasonic transducer (pMUT) comprising:
Dependencies are inferred from the claim text.