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US 11,812,539 B2Granted
Resonator, linear accelerator configuration and ion implantation system having rotating exciter
AssigneeApplied Materials, Inc.
InventorsCostel Biloiu, David T. Blahnik, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair
Life of this patent
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Abstract
An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
Claims19
An exciter for a high frequency resonator, comprising:
- an exciter coil inner portion, extending along an exciter axis;
- an exciter coil loop, disposed at a distal end of the exciter coil inner portion;
- and
- a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.
1 more element
A resonator for a linear accelerator, comprising:
- a toroidal resonator coil, the toroidal resonator coil defining a toroidal shape;
- and
- an exciter, disposed at least partially within the toroidal resonator coil and further comprising:
- an exciter coil inner portion, extending along an exciter axis;
- an exciter coil loop, disposed at a distal end of the exciter coil inner portion;
- and
- a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.
4 more elements
A method of operating a linear accelerator, comprising:
- sending RF power to an exciter of an RF resonator in the linear accelerator, wherein the RF resonator comprises a toroidal resonator coil and a resonator can, and wherein the exciter comprises an exciter loop, disposed within the toroidal resonator coil;
- conducting an ion beam through the linear accelerator;
- and
- rotating the exciter loop while the ion beam is conducted through the linear accelerator, wherein a power coupling between the exciter and the toroidal resonator coil is adjusted.
1 more element
Dependencies are inferred from the claim text.