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US 11,810,755 B2Granted
Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces
AssigneeApplied Materials, Inc.
InventorsLudovic Godet, Joseph C. Olson, Rutger Meyer Timmerman Thijssen
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Abstract
Aspects of the disclosure relate to apparatus for the fabrication of waveguides. In one example, an angled ion source is utilized to project ions toward a substrate to form a waveguide which includes angled gratings. In another example, an angled electron beam source is utilized to project electrons toward a substrate to form a waveguide which includes angled gratings. Further aspects of the disclosure provide for methods of forming angled gratings on waveguides utilizing an angled ion beam source and an angled electron beam source.
Claims13
An etching apparatus, comprising:
- an ion beam chamber comprising an ion beam source;
- a segmented ion source coupled to the ion beam chamber, the segmented ion source comprising a plurality of angled surfaces, wherein the segmented ion source comprises an ion source housing having a plurality of walls including a first wall and a second wall and the plurality of angled surfaces are disposed in the second wall;
- a plurality of electrode assemblies, each electrode assembly aligned with one of the plurality of angled surfaces and comprising:
- an electrode assembly housing having a first opening and a second opening opposite the first opening, the first and second openings partially defining a non-linear trajectory through the electrode assembly housing;
- a first electrode disposed adjacent to the first opening;
- and
- a second electrode disposed adjacent to the second opening and oriented at a non-parallel angle relative to the first electrode, wherein the first and second electrodes are configured to direct an ion beam along the non-linear trajectory between the first and second openings;
- and
- a platen disposed opposite the segmented ion source, wherein the plurality of angled surfaces of the segmented ion source are each disposed at a non-normal angle relative to a supporting surface of the platen and the plurality of angled surfaces are disposed at the same non-normal angle in the second wall.
6 more elements
An etching apparatus, comprising:
- an ion beam chamber comprising an ion beam source;
- a segmented ion source coupled to the ion beam chamber, the segmented ion source comprising a plurality of angled surfaces;
- a plurality of electrode assemblies, each electrode assembly aligned with one of the plurality of angled surfaces and comprising:
- an electrode assembly housing having a first opening and a second opening opposite the first opening, the first and second openings partially defining a non-linear trajectory through the electrode assembly housing;
- a first electrode disposed adjacent to the first opening;
- and
- a second electrode disposed adjacent to the second opening and oriented at a non-parallel angle relative to the first electrode, wherein the first and second electrodes are configured to direct an ion beam along the non-linear trajectory between the first and second openings;
- a platen disposed opposite the segmented ion source, wherein the plurality of angled surfaces of the segmented ion source are each disposed at a non-normal angle relative to a supporting surface of the platen;
- and
- a filter plate coupled to the plurality of angled surfaces.
7 more elements
An etching apparatus, comprising:
- a segmented ion source coupled to an ion beam chamber, the segmented ion source comprising:
- a first wall coupled to the ion beam chamber;
- and
- a second wall disposed opposite the first wall, wherein a plurality of angled surfaces are formed in the second wall;
- a plurality of electrode assemblies, wherein each electrode assembly is disposed adjacent to one of the plurality of angled surfaces and comprises:
- an electrode assembly housing having a first opening and a second opening opposite the first opening, the first and second openings formed in non-parallel walls of the electrode assembly housing and partially defining a non-linear trajectory through the electrode assembly housing;
- a plurality of entrance electrodes disposed adjacent to the first opening;
- a plurality of grounding electrodes disposed adjacent to the second opening, each grounding electrode oriented at a first non-parallel angle relative to each of the plurality of entrance electrodes;
- and
- a plurality of suppression electrodes disposed between the entrance electrodes and the grounding electrodes, at least one of the plurality of suppression electrodes oriented at a second non-parallel angle relative to each of the plurality of entrance electrodes, wherein the entrance electrodes, the grounding electrodes, and the suppression electrodes are configured to focus and direct an ion beam along the non-linear trajectory between the first and second openings;
- and
- a filter plate disposed adjacent to each angled surface of the plurality of angled surfaces, wherein the filter plate is disposed opposite the electrode assembly.
9 more elements
Dependencies are inferred from the claim text.