Ion gun and vacuum processing apparatus
AssigneeCanon Anelva Corporation
InventorsTsutomu Hiroishi, Reiji Sakamoto, Hiroshi Yakushiji
Life of this patent
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Abstract
An ion gun according to one embodiment of the present invention has an anode, a cathode having a first portion and a second portion that face the anode, and a magnet that creates a spatial magnetic field between the first portion and the second portion. An annular gap including a curved portion is provided between the first portion and the second portion of the cathode. The magnet creates lines of magnetic field having the bottom inside with respect to the sectional center line of the gap between the first portion and the second portion of the curved portion.
Claims27
An ion gun comprising:
- an anode;
- a cathode opposed to the anode and having a first portion and a second portion;
- and
- a magnet configured to form a magnetic field space between the first portion and the second portion,
- wherein an annular gap including a curved portion and no linear portion is provided between the first portion and the second portion of the cathode, and
- wherein the magnet is configured to form, between the first portion and the second portion of the curved portion, a magnetic field line having a bottom inside a cross-sectional centerline of the gap.
An ion gun comprising:
- an anode;
- a cathode opposed to the anode and having a first portion and a second portion;
- and
- a magnet configured to form a magnetic field space between the first portion and the second portion,
- wherein an annular gap including a curved portion and no linear portion is provided between the first portion and the second portion of the cathode,
- wherein the first portion is arranged inside with respect to the gap and the second portion is arranged outside with respect to the gap,
- wherein the magnet is configured to form, in a space between the first portion and the second portion and the anode, a magnetic field line in a direction from the second portion to the first portion, and
- wherein in the curved portion, a magnetic field vector at a point where the magnetic field line and the cross-sectional centerline of the gap intersect with each other is inclined with respect to a plane orthogonal to the cross-sectional centerline, at a first angle smaller than 1.5 degrees to a side of the first portion and the second portion, and larger than 0 degrees to a side of the anode.
An ion gun comprising:
- an anode;
- a cathode opposed to the anode and having a first portion and a second portion;
- a magnet configured to form a magnetic field space between the first portion and the second portion;
- a first yoke that magnetically couples the first portion and the magnet to each other;
- and
- a second yoke that magnetically couples the second portion and the magnet to each other,
- wherein an annular gap is provided between the first portion and the second portion of the cathode,
- wherein the first yoke and the second yoke have different magnetic resistances, and
- wherein the magnetic resistance of the first yoke or the second yoke is adjustable.
An ion beam adjusting method adjusting an ion beam ejected from a gap in an ion gun including an anode, a cathode opposed to the anode and having a first portion and a second portion, and a magnet configured to form a magnetic field space between the first portion and the second portion wherein the gap is an annular gap including a curved portion and no linear portion and provided between the first portion and the second portion of the cathode,
- the method comprising:
- adjusting a center position of an ion beam ejected from the gap by shifting a position of a bottom of a magnetic field line formed between the first portion and the second portion of the curved portion toward inside of a cross-sectional centerline of the gap.
An ion beam adjusting method adjusting an ion beam ejected from a gap in an ion gun including an anode, a cathode opposed to the anode and having a first portion and a second portion, and a magnet configured to form a magnetic field space between the first portion and the second portion wherein the gap is an annular gap including a curved portion and no linear portion and provided between the first portion and the second portion of the cathode, wherein the first portion is arranged inside with respect to the gap and the second portion is arranged outside with respect to the gap, and wherein the magnet is configured to form, in a space between the first portion and the second portion and the anode, a magnetic field line in a direction from the second portion to the first portion,
- the method comprising:
- adjusting a center position of an ion beam ejected from the gap by inclining in the curved portion, a magnetic field vector at a point where the magnetic field line and the cross-sectional centerline of the gap intersect with each other toward the anode with respect to a plane orthogonal to the cross-sectional centerline.
An ion beam adjusting method adjusting an ion beam ejected from a gap in an ion gun including, an anode, a cathode opposed to the anode and having a first portion and a second portion, a magnet configured to form a magnetic field space between the first portion and the second portion, a first yoke that magnetically couples the first portion and the magnet to each other, and a second yoke that magnetically couples the second portion and the magnet to each other, wherein the gap is an annular gap provided between the first portion and the second portion of the cathode,
- the method comprising:
- adjusting the magnetic resistance of the first yoke or the second yoke,
- wherein the first yoke and the second yoke have different magnetic resistances.
Dependencies are inferred from the claim text.