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US 11,808,930 B2Granted
Optical objective lens
AssigneeASML Netherlands B.V.
InventorsJian Zhang, Zhiwen Kang, Yixiang Wang
Life of this patent
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Abstract
An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.
Claims15
An optical imaging system used in a charged particle beam inspection comprising:
- an illumination module configured to project a first light beam to an object, wherein the illumination module includes a narrow-band light source;
- an objective lens configured to receive a second light beam reflected from the object and form an image of the object and configured to be used under vacuum conditions;
- and
- a detection module configured to detect the image of the sample,
- wherein the objective lens comprises, sequentially from an image side to an object side:
- a first lens group having negative refractive power;
- and
- a second lens group having positive refractive power.
5 more elements
Dependencies are inferred from the claim text.