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US 11,807,710 B2Granted
UV-curable resins used for chemical mechanical polishing pads
AssigneeCMC Materials, Inc.
InventorsChen-Chih Tsai, Eric S. Moyer, Ping Huang
Life of this patent
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Abstract
The invention provides a UV-curable resin for forming a chemical-mechanical polishing pad comprising: (a) one or more acrylate blocked isocyanates; (b) one or more acrylate monomers; and (c) a photoinitiator. The invention also provides a method of forming a chemical-mechanical polishing pad using the UV-curable resin.
Claims18
A UV-curable resin for forming a chemical-mechanical polishing pad comprising:
- (a) an acrylate blocked isocyanate component, wherein the acrylate blocked isocyanate component comprises an acrylate blocking agent and an isocyanate terminated urethane prepolymer, wherein the acrylate blocking agents are selected from 2-hydroxyethyl acrylate (HEA), 2-hydroxyethyl methacrylate (HEMA), 2-(tert-butylamino) ethyl methacrylate (TBEMA), and 3-(acryloyloxy)-2-hydroxypropyl methacrylate (AHPMA), wherein the acrylate blocking agent and the isocyanate terminated urethane prepolymer form a capped prepolymer, and wherein there is a ratio of particular capped prepolymers in the acrylate blocked isocyanate component;
- (b) one or more acrylate monomers;
- and
- (c) a photoinitiator.
1 more element
A method of forming a polishing pad comprising:
- (a) preparing a UV-curable resin comprising:
- (i) an acrylate blocked isocyanate component, wherein the acrylate blocked isocyanate component comprises an acrylate blocking agent and an isocyanate terminated urethane prepolymer, wherein the acrylate blocking agents are selected from 2-hydroxyethyl acrylate (HEA), 2-hydroxyethyl methacrylate (HEMA), 2-(tert-butylamino) ethyl methacrylate (TBEMA), and 3-(acryloyloxy)-2-hydroxypropyl methacrylate (AHPMA), wherein the acrylate blocking agent and the isocyanate terminated urethane prepolymer form a capped prepolymer, and wherein there is a ratio of particular capped prepolymers in the acrylate blocked isocyanate component;
- (ii) one or more acrylate monomers, and
- (iii) a photoinitiator;
- (b) exposing a thin layer of the UV-curable resin to UV light, initiating a polymerization reaction, and thus forming a thin layer of solidified pad material;
- wherein the method does not include a thermal curing step.
3 more elements
Dependencies are inferred from the claim text.