Method for manufacturing wire saw apparatus and wire saw apparatus
AssigneeShin-Etsu Handotai Co., Ltd.
InventorYoshihiro Usami
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AssigneeShin-Etsu Handotai Co., Ltd.
InventorYoshihiro Usami
Estimating the term…
A method for manufacturing a wire saw apparatus including a wire supply reel; a long roller; wire guides; a wire winding reel; and a tension arm controlled to move within a control angle of ±A (°) set in advance and configured to apply tension to the wire, the method including the steps of: measuring a surface roughness Rmax of the long roller; measuring an angle a (°) of the tension arm at which the tension arm swings outside a range of the control angle set in advance while the wire is extending from the wire supply reel; calculating R1×2×A÷(|a|+A)=R2, where R1 (μm) represents the measured surface roughness Rmax of the long roller; and adjusting the surface roughness Rmax of the long roller to the calculated numerical value R2 or less. The method for manufacturing a wire saw apparatus can prevent the tension arm from greatly swinging outside the control range.
A method for manufacturing a wire saw apparatus, the method comprising the steps of:
Dependencies are inferred from the claim text.