Method for producing a metal-ceramic substrate with electrically conductive vias
AssigneeInfineon Technologies AG
InventorAlexander Roth
Life of this patent
Estimating the term…
Loading patent…
AssigneeInfineon Technologies AG
InventorAlexander Roth
Estimating the term…
A method for producing a metal-ceramic substrate with a plurality of electrically conductive vias includes: attaching a first metal layer in a planar manner to a first surface side of a ceramic layer; after attaching the first metal layer, introducing a copper hydroxide or copper acetate brine into a plurality of holes in the ceramic layer delimiting a via, to form an assembly; converting the copper hydroxide or copper acetate brine into copper oxide; subjecting the assembly to a high-temperature step above 500° C. in which the copper oxide forms a copper body in the plurality of holes; and after converting the copper hydroxide or copper acetate brine into the copper oxide, attaching a second metal layer in a planar manner to a second surface side of the ceramic layer opposite the first surface side. The copper body produces an electrically conductive connection between the first and the second metal layers.
A method for producing a metal-ceramic substrate with a plurality of electrically conductive vias, the method comprising:
Dependencies are inferred from the claim text.