Apparatus for fluidized-bed chemical vapour deposition
AssigneesSafran Ceramic, Centre National De La Recherche Scientifique, Universite De Bordeaux
InventorsAmine El Mansouri, Nathalie Dominique Bertrand, Sébastien Couthures, Alain Jean-Michel Guette
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Abstract
The present disclosure relates to an apparatus for fluidised-bed chemical vapour deposition from a gaseous phase allowing the temperature of the fluidised bed to be stabilised during the deposition and also to an associated method for its implementation, the apparatus being characterised in that it comprises a porous thermal insulator present in an inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m-1·K-1.
Claims9
An apparatus for fluidised-bed chemical vapour deposition, comprising at least:
- a reactor comprising a treatment zone in which the fluidised-bed chemical vapour deposition is intended to be carried out from a gaseous phase, an inlet zone through which the gaseous phase is intended to be introduced into the treatment zone and an outlet zone through which the gaseous phase is intended to be removed from the treatment zone,
- a heating system configured to heat the treatment zone, and
- a cooling system configured to cool the inlet zone,
- wherein the apparatus further comprises a porous thermal insulator present in the inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m−1·K−1, a porosity of the thermal insulator having a tortuous shape.
An apparatus for fluidised-bed chemical vapour deposition, comprising at least:
- a reactor comprising a treatment zone in which the fluidised-bed chemical vapour deposition is intended to be carried out from a gaseous phase, an inlet zone through which the gaseous phase is intended to be introduced into the treatment zone and an outlet zone through which the gaseous phase is intended to be removed from the treatment zone,
- a heating system configured to heat the treatment zone, and
- a cooling system configured to cool the inlet zone,
- wherein the apparatus further comprises a porous thermal insulator present in the inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m−1·K−1, wherein the porous thermal insulator is a granular bed.
Dependencies are inferred from the claim text.