MEMS transducer with improved performance
AssigneeHahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
InventorsAlfons Dehé, Achim Bittner, Lenny Castellanos
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AssigneeHahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
InventorsAlfons Dehé, Achim Bittner, Lenny Castellanos
Estimating the term…
The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.
A microelectromechanical system (MEMS) transducer for interacting with a volume flow of a fluid comprising
A MEMS transducer for interacting with a volume flow of a fluid comprising
Dependencies are inferred from the claim text.