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US 11,799,449 B1Granted
Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims20
A microelectromechanical systems (MEMS) resonator system comprising:
- a first beam and a second beam;
- each of the first beam and the second beam having a longitudinal axis, a first end and a second end, the longitudinal axis of the first beam being parallel to the longitudinal axis of the second beam, the second end of the first beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the first beam, the second end of the second beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the second beam;
- a connecting portion which connects the first end of first beam to the first end of the second beam and to a support element;
- at least one electrode to, during operation of the MEMS resonator system,
- cause deflection of the second end of the first beam, and
- provide an output representing sensed resonant motion of the MEMS system, the sensed resonant motion being at least partially dependent on deflection of the second end of the second beam;
- and
- a conductive element disposed at least partially between the first beam and the second beam, the conductive element arranged so as to impede existence of electrostatic interference in a region which is in between the first beam and the second beam.
5 more elements
A device comprising:
- a common substrate;
- a microelectromechanical systems (MEMS) resonator system on the common substrate, the MEMS resonator system comprising:
- a first beam and a second beam;
- each of the first beam and the second beam having a longitudinal axis, a first end and a second end, the longitudinal axis of the first beam being parallel to the longitudinal axis of the second beam, the second end of the first beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the first beam, the second end of the second beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the second beam;
- a connecting portion which connects the first end of first beam to the first end of the second beam and to a support element;
- at least one electrode to, during operation of the MEMS resonator system,
- cause deflection of the second end of the first beam, and
- provide an output representing sensed resonant motion of the MEMS system, the sensed resonant motion being at least partially dependent on deflection of the second end of the second beam;
- and
- a conductive element disposed at least partially between the first beam and the second beam, the conductive element arranged so as to impede existence of electrostatic interference in a region which is in between the first beam and the second beam;
- and
- drive circuitry on the common substrate, the drive circuitry to supply a drive impetus to the at least one electrode during operation of the MEMS resonator system, the drive impetus to cause at least the second end of the first beam to vibrate during operation of the MEMS resonator system.
9 more elements
A method of fabricating a device, the method comprising:
- providing a common substrate;
- providing a microelectromechanical systems (MEMS) resonator system on the common substrate, wherein the MEMS resonator system has
- a first beam and a second beam;
- each of the first beam and the second beam having a longitudinal axis, a first end and a second end, the longitudinal axis of the first beam being parallel to the longitudinal axis of the second beam, the second end of the first beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the first beam, the second end of the second beam being free to deflect in a direction which is perpendicular to the longitudinal axis of the second beam;
- a connecting portion which connects the first end of first beam to the first end of the second beam and to a support element;
- at least one electrode to, during operation of the MEMS resonator system,
- cause deflection of the second end of the first beam, and
- provide an output representing sensed resonant motion of the MEMS system, the sensed resonant motion being at least partially dependent on deflection of the second end of the second beam;
- and
- a conductive element disposed at least partially between the first beam and the second beam, the conductive element arranged so as to impede existence of electrostatic interference in a region which is in between the first beam and the second beam;
- and
- providing drive circuitry on the common substrate, the drive circuitry configured to supply a drive impetus to the at least one electrode during operation of the MEMS resonator system, the drive impetus to cause at least the second end of the first beam to vibrate during operation of the MEMS resonator system.
9 more elements
Dependencies are inferred from the claim text.