Digitally tunable acoustic wave resonators
AssigneeUniversity of Florida Research Foundation, Inc.
InventorRoozbeh Tabrizian
Life of this patent
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Abstract
A digitally tunable acoustic wave resonator includes, in part, a first electrode positioned above a substrate, a composite stack positioned above the first electrode, and a second electrode positioned above the composite stack. The composite stack may include one or more alternate layers of a ferroelectric layer and a transition-metal nitride layer. The transition-metal nitride layer can be positioned above the ferroelectric layer, except the ferroelectric layer at the top of the composite stack. The ferroelectric layer comprises an aluminum scandium nitride layer Al1-xScxN, where 0<x<1.
Claims20
A digitally tunable acoustic wave resonator comprising:
- a first electrode positioned above a substrate;
- a composite stack positioned above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer;
- and
- a second electrode positioned above the composite stack,
- wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al1-xScxN), and wherein 0<x<1.
A method of fabricating a digitally tunable acoustic wave resonator, comprising:
- forming a first electrode above a substrate;
- forming a composite stack above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer;
- and
- forming a second electrode above the composite stack,
- wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al1-xScxN), and wherein 0<x<1.
Dependencies are inferred from the claim text.