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US 11,799,441 B2Granted
MEMS resonator
AssigneeKYOCERA Tikitin Oy
InventorsAntti Jaakkola, Panu Koppinen
Life of this patent
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Abstract
A microelectromechanical (MEMS) resonator includes a resonator structure having a plurality of beam elements and connection elements with certain geometry, where the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements, where the geometry of the beam elements or the connection elements varies within the resonator structure.
Claims21
A microelectromechanical resonator, comprising:
- a resonator structure having a plurality of beam elements and connection elements with certain geometry, wherein the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements, wherein
- the geometry of the beam elements or the connection elements varies within the resonator structure, and
- the plurality of beam elements comprises adjacent beam elements, wherein a first and nth beam element have a width that is different from a width of other beam elements, and connection elements in between the first and a second as well as in between a (n−1)th and the nth beam element are spaced a distance apart from respective ends of the beam elements.
Dependencies are inferred from the claim text.