Method of forming an integrated resonator with a mass bias
AssigneeTexas Instruments Incorporated
InventorsByron Neville Burgess, William Robert Krenik, Stuart M. Jacobsen
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Abstract
A method of forming a resonator includes forming top and bottom dielectric structures over a substrate. A piezoelectric layer is formed between the top and bottom dielectric structures. A bottom electrode is formed between the piezoelectric layer and the bottom dielectric structure, and a top electrode is formed between the piezoelectric layer and the top dielectric structure. A metal layer is formed over the top dielectric structure and is patterned, thereby forming a first contact pad making electrical contact to the top electrode, a second contact pad making electrical contact with the bottom electrode, and a mass bias located over the top dielectric structure.
Claims20
A method of forming a resonator, comprising:
- forming a bottom dielectric structure over a substrate;
- forming a top dielectric structure over the substrate;
- forming a piezoelectric layer between the top and bottom dielectric structures;
- forming a bottom electrode between the piezoelectric layer and the bottom dielectric structure;
- forming a top electrode between the piezoelectric layer and the top dielectric structure;
- forming a metal layer over the top dielectric structure;
- and
- patterning the metal layer thereby forming a first contact pad making electrical contact to the top electrode, a second contact pad making electrical contact with the bottom electrode, and a mass bias located over the top dielectric structure.
A method of forming a resonator, comprising:
- forming a piezoelectric layer over a substrate;
- forming a dielectric structure over the piezoelectric layer;
- forming a bottom electrode between the piezoelectric layer and the substrate;
- forming a top electrode between the piezoelectric layer and the dielectric structure;
- forming a metal layer over the dielectric structure;
- and
- patterning the metal layer therefrom forming a mass bias located over the piezoelectric layer and at least one contact pad electrically connected to the top electrode or the bottom electrode.
A method of forming a resonator, comprising:
- forming first and second electrode layers over a substrate;
- forming a piezoelectric layer between the first and second electrode layers;
- forming a metal layer over the second electrode layer;
- and
- patterning the metal layer thereby forming a mass bias located over the piezoelectric layer and at least one contact pad electrically connected to the first electrode or the second electrode.
Dependencies are inferred from the claim text.