Semiconductor optical element, semiconductor optical element forming structure, and method of manufacturing semiconductor optical element using the same

A semiconductor optical element, comprising:

• a first conductivity type semiconductor substrate;
• and
• a laminated body disposed on the first conductivity type semiconductor substrate, wherein the laminated body comprises, in the following order from a side of the first conductivity type semiconductor substrate:
• a first conductivity type semiconductor layer;
• an active layer;
• a second conductivity type semiconductor layer;
• and
• a second conductivity type contact layer, wherein
• the second conductivity type semiconductor layer comprises:
• a carbon-doped semiconductor layer in which carbon is doped as a dopant in a compound semiconductor;
• and
• a group 2 element-doped semiconductor layer in which a group 2 element is doped as a dopant in a compound semiconductor, wherein
• the carbon-doped semiconductor layer is disposed at a position closer to the active layer than the group 2 element-doped semiconductor layer, and
• the group 2 element-doped semiconductor layer comprises a graded layer in which a concentration of the dopant increases as a distance from the active layer increases.