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US 11,798,833 B2Granted
Methods of use of a servo control system
AssigneeApplied Materials, Inc.
InventorsPaul Wirth, Behzad Taheri
Life of this patent
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Abstract
Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.
Claims14
A method, comprising:
- receiving by a controller a first pressure measurement from a first pressure sensor that measures pressure in a first chamber of a pneumatic actuator;
- receiving by the controller a second pressure measurement from a second pressure sensor that measures pressure in a second chamber of the pneumatic actuator;
- receiving by the controller a position measurement from a position sensor that measures a position of a moving member of the pneumatic actuator;
- determining by the controller an output force based on a commanded force and an estimated force, wherein the commanded force is based at least in part on the position measurement, and wherein the estimated force is based on the first pressure measurement, the second pressure measurement, and the position measurement;
- generating a control signal based on the output force;
- transmitting the control signal to at least one proportional pneumatic valve of a servo-control system to control pressurized fluid to the pneumatic actuator;
- and
- operating the servo-control system using the control signal.
5 more elements
A method comprising:
- operating a servo-control system, comprising:
- actuating at least one proportional pneumatic valve to permit gas to flow through a first gas line into a first chamber of a pneumatic actuator and through a second gas line into a second chamber of the pneumatic actuator;
- measuring pressure in the first gas line with a first pressure sensor and measuring pressure in the second gas line with a second pressure sensor;
- measuring position of a moving member of the pneumatic actuator with a position sensor;
- determining an output force based on a commanded force and an estimated force, wherein the commanded force is based at least in part on the position of the moving member, and wherein the estimated force is based on the pressure in the first gas line, the pressure in the second gas line, and the position of the moving member;
- and
- controlling the at least one proportional pneumatic valve with the servo-control system to apply a contact force of about 2 N to about 10 N by the moving member based on the output force.
4 more elements
A method, comprising:
- receiving by a controller a first pressure measurement from a first pressure sensor that measures pressure in a first chamber of a pneumatic actuator;
- receiving by the controller a second pressure measurement from a second pressure sensor that measures pressure in a second chamber of the pneumatic actuator;
- receiving by the controller a position measurement from a position sensor that measures a position of a moving member of the pneumatic actuator;
- determining by the controller an output force of the pneumatic actuator based on a difference between the first pressure measurement and the second pressure measurement;
- determining by the controller a stiffness of the pneumatic actuator based on adding the first pressure measurement to the second pressure measurement;
- generating a control signal based on the first pressure measurement, the second pressure measurement and the position measurement;
- transmitting the control signal to at least one proportional pneumatic valve of a servo-control system to control pressurized fluid to the pneumatic actuator;
- and
- operating the servo-control system using the control signal.
6 more elements
Dependencies are inferred from the claim text.