Charged particle assessment tool, inspection method
AssigneeASML Netherlands B.V.
InventorMarco Jan-Jaco Wieland
Life of this patent
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Abstract
A charged particle assessment tool includes: an objective lens configured to project a plurality of charged particle beams onto a sample, the objective lens having a sample-facing surface defining a plurality of beam apertures through which respective ones of the charged particle beams are emitted toward the sample; and a plurality of capture electrodes adjacent respective ones of the beam apertures and configured to capture charged particles emitted from the sample.
Claims20
A multi-beam charged particle optical column configured to direct a multi-beam towards a sample, the multi-beam being generated down-beam from a source, the column comprising:
- an objective lens configured to project a plurality of charged particle beams of the multi-beam onto the sample, the objective lens defining a plurality of beam apertures through which respective ones of the charged particle beams can propagate toward the sample;
- and
- a detector configured to capture charged particles emitted from the sample, wherein the detector comprises sensor units adjacent the beam apertures and configured to capture charged particles emitted from the sample and wherein the detector is actuatable along the path of the multi-beam.
An inspection method comprising:
- emitting a multi-beam of a plurality of charged-particle beams through a plurality of beam apertures to a sample;
- and
- capturing charged particles emitted by the sample in response to the charged-particle beams using a detector, wherein the detector comprises sensor units adjacent respective beam apertures and capturing the charged particles emitted from the sample;
- and
- changing a position of the detector along a path of the multi-beam.
A charged particle assessment tool comprising:
- an objective lens configured to project a plurality of charged particle beams onto a sample through a plurality of beam apertures defined in the objective lens;
- and
- a sensor array comprising sensor units adjacent respective beam apertures and configured to capture charged particles emitted from the sample,
- wherein the sensor array is configured to be adjustable between positions along beam paths of the charged particle beams.
Dependencies are inferred from the claim text.