Method for determining root causes of events of a semiconductor manufacturing process and for monitoring a semiconductor manufacturing process
AssigneeASML Netherlands B.V.
InventorsChang-Wei Chen, Si-Han Zeng
Life of this patent
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Abstract
A user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface including: a library of control elements having at least a control element representing a task of simulation and each control element being selectable by a user; a control flow editor configured to organize the control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.
Claims20
A control strategy evaluation hardware tool comprising:
- one or more processors,
- software, when executed by the one or more processors, configured to generate a user interface on a hardware display, the user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising:
- a library of control elements comprising at least a control element representing a task of simulation to be performed during execution of the control strategy to physically control the semiconductor manufacturing process and each control element being selectable by a user, and
- a control flow editor configured to organize the control elements into a control flow representing the control strategy;
- and
- software configured to implement a calculation engine configured to:
- simulate the control strategy described by the control flow, and
- evaluate the control strategy based on the simulation.
A non-transitory computer program carrier comprising a computer program stored therein, the computer program, upon execution by a computer system, configured to cause the computer system to at least:
- generate a user interface on a hardware display, the user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising:
- a library of control elements comprising at least a control element representing a task of simulation to be performed during execution of the control strategy to physically control the semiconductor manufacturing process and each control element being selectable by a user, and
- a control flow editor configured to organize the control elements into a control flow representing the control strategy;
- and
- implement a calculation engine configured to:
- simulate the control strategy described by the control flow, and
- evaluate the control strategy based on the simulation.
Dependencies are inferred from the claim text.