Manufacturing method of porous glass base material for optical fiber
AssigneeShin-Etsu Chemical Co., Ltd.
InventorNaoto Noda
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorNaoto Noda
Estimating the term…
A manufacturing method of a porous glass base material for optical fiber includes: supplying an organic siloxane raw material supplied from a raw material tank is fed to a vaporizer; mixing and vaporizing the raw material and carrier gas in the vaporizer; and externally depositing SiO2 fine particles through combustion reaction by supplying the mixed gas of raw the material and the carrier gas to the burner in the manufacturing apparatus of porous glass base material for optical fiber. Before starting to supply the raw material to a raw material gas supply pipe of the burner, the burner and the inside of a manufacturing apparatus of porous glass base material for optical fiber are pre-heated by flowing purge gas of 60° C. or higher into the raw material gas supply pipe and supplying combustible gas and combustion supporting gas to the burner.
A manufacturing method of porous glass base material for optical fiber by depositing glass fine particles on a starting material, comprising:
Dependencies are inferred from the claim text.