Processing apparatus

A processing apparatus for processing a workpiece, comprising:

• a jig table including a holding area for holding a workpiece thereon, a first suction channel having an end connected to the holding area and another end open at a lower surface of the jig table, and a second suction channel having an end connected to the holding area and another end open at an upper surface of the jig table;
• a table base to which the jig table is removably secured, the table base configured to supply negative pressure to the first suction channel from the lower surface of the jig table to the holding area;
• a processing unit for processing the workpiece held on the jig table secured to the table base;
• a moving assembly for moving the table base between a processing area where the workpiece is processed by the processing unit and a mounting/dismounting area where the jig table is mounted on and dismounted from the table base;
• a temporary rest area for temporarily placing thereon the jig table on which the workpiece is supported before the workpiece is processed by the processing unit;
• and
• a delivery assembly for delivering the jig table from the temporary rest area onto the table base while applying a negative pressure to the second suction channel of the jig table,
• wherein the delivery assembly includes
• a pair of grippers for gripping both sides of the jig table from above,
• a suction pipe connected to an opening of the second suction channel of the jig table configured to supply negative pressure to the holding area to hold the workpiece under suction thereon, and
• a lifting and lowering unit for lifting and lowering the suction pipe to position the suction pipe selectively in an operative position where the suction pipe is connected to the opening of the second suction channel and a lifted position where the suction pipe is spaced from the opening of the second suction channel, and
• wherein the grippers are operatively connected to the lifting and lowering unit by a link mechanism and are openable and closable in response to lifting and lowering movement of the lifting and lowering unit for thereby selectively releasing and gripping the jig table.