Small gap device system and method of fabrication
AssigneesSpark Thermionics, Inc., The Trustees of the University of Pennsylvania
InventorsMatthew Campbell, Mohsen Azadi, Kyana Van Houten, Jared William Schwede, Samuel M. Nicaise, Igor Bargatin
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Abstract
A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
Claims20
A thermionic energy converter system, comprising:
- a first electrode comprising a first surface;
- a second electrode comprising a second surface;
- and
- a mesh spacer maintaining a gap between the first and second surfaces;
- wherein:
- the first and second surfaces are arranged facing each other across the gap;
- the mesh spacer electrically and thermally isolates the first electrode from the second electrode;
- the mesh spacer defines a mesh structure comprising a set of vertices and a set of paths connected between vertices of the set, the set of vertices comprising a first, second, and third vertex, the set of paths comprising:
- a first path extending from the third vertex to the second vertex;
- and
- a second path extending from the third vertex to the first vertex;
- the mesh spacer comprises a set of legs extending substantially along the set of paths, the set of legs comprising:
- a first canaliculate leg defining a first lumen extending substantially along the first path;
- and
- a second canaliculate leg defining a second lumen extending substantially along the second path, the second leg connected to the first leg via the set of legs;
- the first lumen defines a first opening facing the first surface;
- the first canaliculate leg comprises a first elongated member, wherein:
- the first elongated member extends substantially along the first path;
- the first elongated member bounds the first lumen, opposing the first opening across the lumen;
- and
- the second surface opposes the first lumen across the first elongated member;
- the mesh spacer defines a plurality of apertures between legs of the set of legs, wherein, for each aperture of the plurality, a respective normal vector from the first surface to the second surface passes through the aperture and does not intersect the mesh spacer;
- the mesh spacer contacts the first surface at a first set of contact points;
- the mesh spacer defines a plurality of protrusions that protrude within the gap toward the second surface, wherein:
- the plurality of protrusions comprises a first protrusion that protrudes from the first elongated member toward the second surface;
- and
- each protrusion of the plurality contacts the second surface;
- and
- for each contact point of the first set, a respective normal vector from the contact point to the second surface does not intersect the plurality of protrusions.
A thermionic energy converter system, comprising:
- a first electrode comprising a first surface;
- a second electrode comprising a second surface;
- and
- a mesh spacer maintaining a gap between the first and second surfaces;
- wherein:
- the first and second surfaces are arranged facing each other across the gap;
- the mesh spacer electrically and thermally isolates the first electrode from the second electrode;
- the mesh spacer defines a mesh structure comprising a set of vertices and a set of paths connected between vertices of the set, the set of vertices comprising a first, second, and third vertex, the set of paths comprising:
- a first path extending from the third vertex to the second vertex;
- and
- a second path extending from the third vertex to the first vertex;
- the mesh spacer comprises a set of legs extending substantially along the set of paths, the set of legs comprising:
- a first leg extending substantially along the first path, the first leg comprising a first face that contacts the first surface;
- and
- a second leg extending substantially along the second path, the second leg connected to the first leg via the set of legs, the second leg comprising a second face that contacts the first surface;
- the mesh spacer defines a plurality of apertures between legs of the set of legs, wherein, for each aperture of the plurality, a respective normal vector from the first surface to the second surface passes through the aperture and does not intersect the mesh spacer;
- the mesh spacer defines a plurality of protrusions that protrude within the gap toward the second surface, each protrusion of the plurality contacting the second surface;
- and
- a normal projection of the plurality of protrusions onto the first surface does not intersect any contact points between the mesh spacer and the first surface.
Dependencies are inferred from the claim text.