Defect inspection apparatus and defect inspection method
AssigneeShimadzu Corporation
InventorsKoki Yoshida, Takahide Hatahori, Kenji Takubo
Life of this patent
Estimating the term…
Abstract
This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (3), an imaging unit (35), and a control unit (4) for generating a moving image (61) related to the propagation of an elastic wave of an inspection target (7). The control unit is configured to perform control to display an identified measurement inappropriate region (81) in such a manner as to be distinguishable from a measurement appropriate region (82) in which the vibration state has been correctly acquired in the moving image (61).
Claims19
A defect inspection apparatus comprising:
- an excitation unit configured to excite an elastic wave to an inspection target;
- a laser illumination unit configured to emit laser light onto the inspection target;
- an interference unit configured to cause laser light reflected at different positions of the inspection target excited by the excitation unit to interfere with each other;
- an imaging unit configured to acquire an image of the interfered laser light;
- and
- a control unit configured to acquire a vibration state based on a plurality of still images acquired by the imaging unit and generate a moving image related to propagation of an elastic wave of the inspection target,
- wherein the control unit is configured to perform control to identify a measurement inappropriate region in which the vibration state has not been correctly acquired, based on an imaging result by the imaging unit and display the measurement inappropriate region in such a manner as to be distinguishable from a measurement appropriate region, and
- wherein the control unit is configured to perform control to identify a region in which a light quantity of the interfered laser light acquired by the imaging unit is insufficient or excessive to correctly acquire the vibration state by the control unit, as the measurement inappropriate region.
A defect inspection method comprising:
- exciting an elastic wave to an inspection target;
- irradiating the inspection target with laser light;
- causing laser light reflected at mutually different positions of the excited inspection target to interfere with each other;
- acquiring an image by the interfered laser light;
- acquiring a vibration state based on a captured still image and generating a moving image related to propagation of the elastic wave of the inspection target;
- identifying a measurement inappropriate region in which the vibration state has not been correctly acquired, based on an imaging result;
- displaying the measurement inappropriate region in the moving image in such a manner as to be distinguishable from a measurement appropriate region;
- and
- performing control to identify a region in which a light quantity of the interfered laser light acquired by the imaging unit is insufficient or excessive to correctly acquire the vibration state by the control unit, as the measurement inappropriate region.
Dependencies are inferred from the claim text.