Transport control apparatus and transport control system including the same
AssigneeSemes Co., Ltd.
InventorSu Jong Yu
Life of this patent
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AssigneeSemes Co., Ltd.
InventorSu Jong Yu
Estimating the term…
There is provided a transport control system assigning multiple jobs to an overhead hoist transport (OHT) based on the availability of linkage transporting and the likelihood of transport congestion. The transport control system includes: a plurality of transports, each of the plurality of transports transporting a carrier with a wafer loaded thereon; and a transport control apparatus controlling the plurality of transports and determining one of the plurality of transports as a target transport to which multiple jobs are to be assigned. The transport control apparatus determines one of the plurality of transports as the target transport based on a first element, which is the availability of linkage transporting, and a second element, which is the likelihood of transport congestion.
A transport control system comprising:
A transport control system comprising:
A transport control apparatus controlling a plurality of transports, each of the plurality of transports transporting a carrier with a wafer loaded thereon,
Dependencies are inferred from the claim text.