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US 11,786,745 B2Granted
Plasma treatment apparatus
AssigneeFeagle Co., Ltd
InventorsHyunyoung Lee, Jeonghae Choi, Yeonsuk Song
Life of this patent
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Abstract
Disclosed is a plasma treatment apparatus that includes a cover attached to a body part, a plasma generation unit that generates plasma and provides the plasma to the cover, a gas supply unit that supplies a source gas for generating the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust gas from the cover.
Claims19
A plasma treatment apparatus comprising:
- a cover configured to be attached to a body part;
- a plasma generation unit configured to generate plasma and provide the plasma to the cover;
- a gas supply unit configured to supply a source gas for generating the plasma to the plasma generation unit;
- an exhaust unit configured to exhaust an exhaust gas from the cover;
- a by-product removal unit configured to remove a by-product from the exhaust gas;
- a sensor unit configured to detect whether the body part is sealed by the cover;
- and
- a controller configured to control the plasma generation unit, depending on whether the body part is sealed or not.
5 more elements
Dependencies are inferred from the claim text.