Differential resonator and MEMS sensor

A micro electromechanical systems sensor, comprising a differential resonator, the differential resonator comprising a substrate, a first resonator, a second resonator and a coupling mechanism, the first resonator being connected with the second resonator through the coupling mechanism, and the first resonator and the second resonator being connected with the substrate and being able to be displaced relative to the substrate under an external force, and a direction in which the first resonator is displaced and a direction in which the second resonator is displaced being opposite to each other, wherein:

• the coupling mechanism comprises a first guide beam, a second guide beam, a first coupling beam, a second coupling beam, a first connecting piece and a second connecting piece;
• the first guide beam and the second guide beam are arranged on opposite sides of a direction perpendicular to a vibration direction of the first resonator or the second resonator;
• the first coupling beam has one end connected with the first guide beam, one other end connected with the second guide beam, and a middle portion connected with the first resonator through the first connecting piece;
• and
• the second coupling beam has one end connected with the first guide beam, one other end connected with the second guide beam, and a middle portion connected with the second resonator through the second connecting piece.